Breakthroughs have been achieved in key technologies for Automated Material Handling Systems (AMHS) required in semiconductor manufacturing. The core overhead handling (OHT) crane system now reaches internationally advanced performance levels, with a linear speed of up to 5.3 meters per second, a maximum load capacity of 50 kilograms, millimeter-level positioning accuracy, and stability achieving 99.999% availability. Annual unplanned downtime is controlled within 5 minutes. The supporting software system has been independently developed, encompassing core modules such as material scheduling, path obstacle avoidance, and digital twins. It seamlessly integrates with existing production management systems in wafer fabs, breaking overseas technological monopolies. Currently deployed in multiple large-wafer fabs, it is driving the advancement of full-process automation in semiconductor manufacturing.